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八十年代后期,贝尔实验室首先提出了GaAs/AlGaAs多量子阱(MQW)结构的红外探测器,并报道了器件性能。近几年来,广泛开展了对量子阱等超晶格结构的红外探测器的研究,特别是128×128元二维阵列的开发,其优异的红外图像证实了GaAs/AlGaAs量子阱探测器的潜在能力。 本文介绍了量子阱红外探测器技术的发展动向。以GaAs/AlGaAs量子阱红外探测器为主,简要概述了各种器件的结构、工作原理及性能;同时对不同结构的器件进行了比较,并且介绍了它们在红外成像方面的应用。
In the late 1980’s, Bell Labs first proposed an infrared detector with a GaAs / AlGaAs multiple quantum well (MQW) structure and reported device performance. In recent years, extensive research has been carried out on infrared detectors with superlattice structures such as quantum wells. In particular, the development of a 128 × 128-element two-dimensional array has demonstrated the potential of GaAs / AlGaAs quantum well detectors with excellent infrared images ability. This article describes the quantum well infrared detector technology trends. GaAs / AlGaAs quantum well infrared detectors are the main parts. The structure, working principle and performance of various devices are briefly introduced. At the same time, the devices with different structures are compared and their applications in infrared imaging are also introduced.