使用紫外可见分光光度计测量光学薄膜,获得透过率图谱或者反射、吸收谱,利用薄膜上下表面光的干涉原理,通过简单计算,就可以方便快捷地估算出薄膜厚度。用磁控溅射法制备了ITO薄膜,使用该干涉法和台阶仪分别测量了膜厚,将结果进行了对比。结果表明,干涉法测量光学薄膜简单、快捷,设备要求不高,实用性强,方法可行。 Using the UV-visible spectrophotometer to measure the optical film, obtaining the transmittance spectrum or the reflection and absorption spectrum, and using the interference principle of the light on the upper and lower surfaces of the film, the thickness of the film can be estimated quickly and easily by simple calculation. ITO thin films were prepared by magnetron sputtering. The thickness of the ITO films was measured by using the interference method and the stepper. The results were compared. The results show that the interference method is simple and quick to measure the optical film, the equipment is not demanding, practicality, the method is feasible.