论文部分内容阅读
金刚石薄膜的附着力是影响CVD金刚石涂层刀具切削性能的关键因素。本文采用EACVD法在硬质合金 (YG6 )基体上沉积金刚石涂层 ;用Ar -H2 微波等离子对WC -Co衬底进行刻蚀处理 ,以改变基体表面与金刚石涂层间的界面结构 ,提高金刚石涂层的附着力 ;采用压痕法评估涂层附着力 ;借助SEM等观察刻蚀预处理方法对膜基界面的影响 ,并对此进行分析和讨论。
The adhesion of diamond films is a key factor that affects the cutting performance of CVD diamond coated tools. In this paper, EACVD method was used to deposit diamond coating on cemented carbide (YG6) substrate. The WC-Co substrate was treated with Ar-H2 microwave plasma to change the interfacial structure between substrate and diamond coating, Coating adhesion; indentation method to assess coating adhesion; observed by SEM and other etching pretreatment method on the membrane-based interface, and to analyze and discuss.