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为了满足微加工效率,便于数控编程,选用弓字型激光扫描路径,介绍了温度场控制方程,引入高斯激光功率密度随时间改变的特性对激光束强度分布进行计算。不考虑硬脆材料表面性质、氧化层、等离子体等因素对吸收系数产生的影响,假设硬脆材料吸收系数在激光表面微加工中是一个固定值,对激光表面微加工前沿表面元的局部吸收光功率进行计算。引入微元近似法获取热传导损耗的功率,给出熔化和蒸发表面硬脆材料消耗的功率计算公式,获取功率平衡方程。针对激光和硬脆材料作用区域逐点求出对应微加工量,获取整个微加工轮廓。实验结果表明,采用所构建模型实现激光表面硬脆材料的微加工,不仅加工质量好,而且效率高。
In order to meet the micromachining efficiency, it is convenient for NC programming. The bow-shaped laser scanning path is selected. The governing equation of temperature field is introduced. The laser beam intensity distribution is introduced by introducing the power density change of Gaussian laser with time. Regardless of the surface properties of hard and brittle materials, oxide, plasma and other factors on the absorption coefficient, the assumption that the hard and brittle material absorption coefficient in the laser surface micro-machining is a fixed value, the laser surface micro-machining of the local absorption of surface elements Optical power is calculated. The power of heat conduction loss was obtained by introducing the approximate method of the micro-element. The power calculation formula for the consumption of the hard and brittle material on the surface of the melting and evaporation was given, and the power balance equation was obtained. For laser and hard brittle material area by point to find the corresponding micro-processing volume, access to the entire micro-machining profile. The experimental results show that the micro-machining of laser-hard and brittle materials is achieved by using the constructed model, which not only has good processing quality but also high efficiency.