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用电淀积方法制作CdTe薄膜,可降低半导体材料的消耗和生产费用,对降低太阳电池成本具有很大吸引力。但由于发展较晚,工艺尚不成熟,重覆性也差。其原因是对成膜机理和各种影响因素未能有足够了解。为此,我们在不同电淀积条件下制备了CdTe薄膜,并对它作了X射线结构分析和电镜观察,初步得出一些结果: 1.有些CdTe薄膜中,出现Cd晶粒、针孔、裂缝等缺陷,对薄膜质量是有害的。它们的出现与许多因素有关,如电淀积过程中搅拌情况,衬底的表面状态,电介液的组成,阴极电位,电流密度,以及样品中的残余内应力等。 2.电淀积CdTe多晶薄膜都有不同程度的织构现象,这对改善太阳电池性能有利。提出了一个柱状晶体生长模型加以解释。
Electrodeposition of CdTe thin films, can reduce the consumption of semiconductor materials and production costs, to reduce the cost of solar cells has great appeal. However, due to the late development, the technology is not yet mature and the repeatability is also poor. The reason is that the film forming mechanism and a variety of influencing factors can not fully understand. For this reason, we prepared CdTe thin films under different electrodeposition conditions and made X-ray structure analysis and electron microscopy observations. Some results are obtained initially: 1. In some CdTe films, Cd grains, pinholes, Cracks and other defects, the quality of the film is harmful. Their appearances depend on many factors such as the agitation during electrodeposition, the surface state of the substrate, the composition of the electrolyte, the cathode potential, the current density, and the residual internal stress in the sample. 2. Electrodeposited CdTe polycrystalline films have different degrees of texture, which is beneficial to improve solar cell performance. Proposed a columnar crystal growth model to be explained.