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介绍了高频声体波微波延迟线用多层结构氧化锌薄膜的制作方法，并对这种交替排列不同结晶取向的多层氧化锌薄膜的微观结构、成膜机理进行了分析和阐述。用具有不同机电耦合系数、厚度为半波长的交替排列多层氧化锌薄膜制成了中心频率为８ＧＨｚ的声体波微波延迟线。同时亦给出了这种新结构的氧化锌压电材料的生长条件及相应的实验结果
The fabrication method of multilayer zinc oxide thin film for high frequency acoustic wave microwave delay line was introduced. The microstructure and film formation mechanism of the multilayer zinc oxide thin films with different crystal orientations were alternately arranged and analyzed. Acousto-microwave delay lines with a center frequency of 8 GHz were fabricated by alternately arranging a plurality of zinc oxide films with different electromechanical coupling coefficients and a half-wavelength thickness. At the same time, the growth conditions of zinc oxide piezoelectric material with the new structure and the corresponding experimental results