一、对氦质谱检漏仪灵敏度的要求和使用监视漏孔(标准漏孔)。从制管出发要求检漏达到这样一个水平:凡部件和整管有漏,要求检漏一定能检出来。凡经检漏的管子能存放几年而真空度不变。为了达到这个要求,一方面要求检漏仪有足够的灵敏度,另一方面仪器使用时要求处于对氦气灵敏的工作状态。 First, the sensitivity of the helium mass spectrometer leak detector requirements and use of monitoring leaks (standard leaks). Requirements from the pipe leak detection to achieve such a level: Where parts leaks and the entire pipe, required leak detection will be able to check out. Where leaky tube can be stored for several years and the degree of vacuum unchanged. In order to meet this requirement, on the one hand requires that the leak detector have sufficient sensitivity, on the other hand, the instrument requires that it be in a working state sensitive to helium.