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报道了已研制成的低温下使用的多用碳薄膜电阻温度计。用电子束把碳蒸发在以铜膜作为电联接的多晶氧化铝基片上,温度计表面由一层薄玻璃涂层包覆,通过最后一次热处理,可获得敏感元件所要求的电阻。在4.2K下,温度计的灵敏度约为300ΩK~(-1)。在4.2K到20K之间,用一个普通关系式lnR=A_n+A_1lnT+A_2(lnT)~2,可把膜阻表示为温度的函数。这些敏感元件已发展成为能焊接或粘贴在实验试样上的独立器件。此外,它们的响应速度怏:在4.2K下,其热驰豫时间优于1毫秒,热滞后时间约为70微秒的数量级。
Reported the use of multi-purpose carbon film resistance thermometer has been developed at low temperatures. Evaporation of carbon onto a polycrystalline alumina substrate electrically coupled with a copper film is performed with an electron beam. The surface of the thermometer is covered with a thin glass coating, and the required resistance of the sensor is obtained by the last heat treatment. At 4.2K, the sensitivity of the thermometer is about 300ΩK ~ (-1). Between 4.2K and 20K, the film resistance can be expressed as a function of temperature with a normal relation of lnR = A_n + A_1lnT + A_2 (lnT) ~ 2. These sensitive components have evolved into separate devices that can be soldered or pasted on experimental coupons. In addition, their response speed 怏: At 4.2K, the thermal relaxation time is better than 1 millisecond and the thermal lag time is on the order of 70 microseconds.