机电部合肥低温电子研究所承担的大规模集成电路基础研究项目—φ300mm低温泵8月10日通过了技术鉴定。 鉴定委员会由复旦大学、中国科技大学、合肥工业大学,安徽大学、上海技物所、中科院等离子体所、机电部43所等高校和研究所的10名专家和学者组成。经过审阅有关文件资 Hefei Institute of Electrical and Mechanical Services Department of low temperature electronic research institute commitment to large-scale integrated circuit basic research project-φ300mm cryogenic pump on August 10 passed the technical appraisal. The accreditation committee consists of 10 experts and scholars from colleges and institutes such as Fudan University, University of Science and Technology of China, Hefei University of Technology, Anhui University, Shanghai Institute of Technology, Chinese Academy of Sciences and other institutes of plasma and electronics. After reviewing the relevant documents and materials