研究了一种新的硅微陀螺仪闭环驱动方案,对推挽驱动方式的性能进行了分析,结果表明驱动力矩的频段与噪声信号频段是分离的,因此噪声信号不会影响到驱动效果。在此基础上,利用锁相技术满足正弦自激振荡的相角和增益条件,建立环路的自激振荡,实现了闭环控制。同时在闭环回路中利用正弦自激振荡的相角条件和锁相环的鉴相特性,消除了驱动信号对敏感信号的同频干扰,并抑制了环路中的噪声干扰,明显提高闭环性能。试验结果显示在1小时内交流信号频率和幅度的标准方差分别为0.132 H z和0.258 mV,实现了驱动稳幅稳频的目的,从而使陀螺仪精度和可靠性得到了显著提高。 A new closed-loop driving scheme of silicon micro-gyroscope is studied. The performance of the push-pull driving mode is analyzed. The results show that the frequency band of the driving torque is separated from the frequency band of the noise signal, so the noise signal will not affect the driving effect. Based on this, phase-locked loop (PLL) technique is used to satisfy the phase and gain conditions of sinusoidal self-oscillating oscillation, and the self-oscillation of the loop is established to realize the closed-loop control. At the same time, by using the phase angle condition of sinusoidal self-oscillation and phase discrimination characteristic of the PLL, the co-channel interference of the driving signal to the sensitive signal is eliminated and the noise in the loop is restrained. The closed-loop performance is obviously improved. The experimental results show that the standard deviation of the AC signal frequency and amplitude within 1 hour are 0.132 Hz and 0.258 mV, respectively, which realizes the purpose of driving steady amplitude and frequency stabilization, so that the accuracy and reliability of the gyroscope are significantly improved.