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本X光谱仪是一种线性全聚焦弯晶谱仪。装备在扫描电镜上后,可使之兼具电子探针X光微区分析仪的功能。本文重点讨论了X光光谱仪的几何精度、分光晶体的制备、光谱仪与电子光学镜筒的匹配衍射峰值强度的提高、本底噪音的减低以及同轴光学显微镜的匹配等问题。X光谱仪的总几何精度应为±1′,重复精度为6″。实际结果表明,元素分析范围为B~5(Be~4)～U~(92);波长分辨率△λ/λ为1～5×10~(-3)(Na~(11)～U~(92))及1～5×10~(-2)(B~5～F~9),可分开Cu,Fe,Ti等元素的K_(α1,α2)谱线,Ti-6A1-4V合金中VK_(α1),VK_(α2)及TiK_β谱线;波长重复性为0.00014A;探测限对Na~(11)～U~(92)为10~(-3)％量级,B~5～F~9为10~(-2)％量级。
The X-ray spectrometer is a linear fully focused curved crystal analyzer. Equipped with a scanning electron microscope, it can also function as an electron probe X-ray microanalyzer. This article focuses on the geometry accuracy of X-ray spectrometers, the preparation of spectroscopic crystals, the increase of the matching diffraction peak intensities of spectrometers and electron optical tubes, the reduction of background noise, and the matching of coaxial optical microscopes. The total geometrical accuracy of the X-ray spectrometer should be ± 1 ’with the repeatability of 6 ". The actual results show that the elemental analysis range is B ~ 5 (Be ~ 4) ~ U ~ (92); the wavelength resolution △ λ / λ is 1 Fe, Ti can be separated from 5 ~ 10 ~ (-3) (Na ~ (11) ~ U ~ 92) and 1 ~ 5 × 10 ~ (-2) (Α1, α2) spectra of Ti-6Al-4V alloy and VK_ (α1), VK_ (α2) and TiK_β spectra in Ti-6A1-4V alloy with wavelength repetition of 0.00014A. ~ (92) is on the order of 10 ~ (-3)%, and B ~ 5 ~ F ~ 9 is on the order of 10 ~ (-2)%.