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平面磁控阴极用于大面积等离子体放电具有大幅降低放电电压和放电气压的优点 ,是PEPC首选的放电途径。通过对不同尺寸、不同磁场强度和不同气压状态下放电实验研究表明 :在较宽的磁场强度范围内都可实现全口径的均匀等离子体放电 ,电极几何尺寸的小量变化对放电均匀性的影响不大。给出了满足 30 0 mm× 30 0 mm放电腔的放电参数。
Planar magnetron cathodes for large area plasma discharge have the advantage of greatly reducing the discharge voltage and discharge pressure and are the preferred discharge pathways for PEPC. The experimental results of discharge under different sizes, different magnetic field strengths and different pressure states show that full-diameter uniform plasma discharge can be achieved over a wide range of magnetic field strength, and the influence of a small change of electrode geometry on discharge uniformity Not big. The discharge parameters satisfying 30 0 mm × 300 mm discharge cavity are given.