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室温下,采用射频磁控溅射法在玻璃和聚对苯二甲酸乙二醇酯(polyethylene terephthalate,PET)上沉积了掺铝的氧化锌(ZnO:Al,AZO)透明导电薄膜。通过X射线衍射仪分析不同衬底上AZO薄膜的结构,采用四探针测试仪及紫外可见光分光光度计测试薄膜的光电性能。结果表明:沉积在两种衬底上的AZO薄膜都具有六方纤锌矿结构,最佳取向均为[002]方向;玻璃衬底和PET衬底上制备的AZO薄膜的方阻分别为19/sq和45/sq,薄膜透光率均高于90%。实验表明,柔性衬底透明导电氧化物薄膜可以代替硬质衬底透明导电薄膜使电子器件向小型化、轻便化方向发展。
At room temperature, aluminum-doped zinc oxide (ZnO: Al, AZO) transparent conductive films were deposited on glass and polyethylene terephthalate (PET) by RF magnetron sputtering. The structure of AZO thin films on different substrates was analyzed by X-ray diffractometer. The photoelectric properties of the films were tested by four-probe tester and UV-visible spectrophotometer. The results show that the AZO thin films deposited on both substrates have hexagonal wurtzite structure with the best orientations all in the [002] direction. The square resistance of the AZO thin films deposited on glass substrate and PET substrate is 19 / sq and 45 / sq, the light transmittance of the film is higher than 90%. Experiments show that the flexible substrate transparent conductive oxide film can replace the hard substrate transparent conductive film to make the electronic device to the direction of miniaturization and lightness.