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利用有限元分析软件数值模拟了固体激光器系统中由单晶硅(Silicon)、石英(Silica)与超低膨胀玻璃(ULE)等不同材料制作的变形反射镜受激光辐照下的热畸变特性。计算结果表明:当入射激光功率密度为0.225 k W/cm~2,激光照射时间为10 s,镜面反射率为99.9%时,三种材料的变形镜的最大温升分别为0.804、6.751与7.122℃,最大热变形分别为0.049 3、0.034 8与0.005 4μm,相比之下,单晶硅温升较小,超低膨胀玻璃(ULE)的变形与应力最小,ULE是未来比较理想的镜面材料。最后,对变形镜在长脉冲激光辐照下也进行了计算与分析。
The finite element analysis software was used to numerically simulate the thermal distortion of the deformable mirror made of different materials such as silicon, quartz and ultra-low expansion glass (ULE) in solid-state laser system. The calculated results show that the maximum temperature rise of the deformable mirrors of the three materials are 0.804, 6.751 and 7.122 respectively when the incident laser power density is 0.225 k W / cm ~ 2, the laser irradiation time is 10 s and the specular reflectivity is 99.9% ℃, the maximum thermal deformation is 0.049 3, 0.034 8 and 0.005 4μm respectively. In contrast, the temperature rise of single crystal silicon is smaller and the deformation and stress of ultra low expansion glass (ULE) are the smallest. ULE is the ideal mirror material in the future . Finally, the deformation mirror was also calculated and analyzed under the long-pulse laser irradiation.