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本文是描述交流高压潘宁(Penning)放电抽气特性的实验报告。研究的重点是在交流高压10-100仟伏有效值范围内工作时,使真空维持在10-5托的压强范围内。这个泵能自动维持设备中的真空,将用来做交流高压电源的一部分。 I、前言 直流潘宁放电吸收电子的原理,已经应用于抽空设备的设
This article is an experimental report describing the discharge pumping characteristics of high voltage Penning discharge. The focus of the study was to maintain the vacuum at a pressure in the range of 10-5 Torr while operating at an effective voltage range of 10-100 kV AC. This pump automatically maintains the vacuum in the equipment and will be used as part of the AC high voltage power supply. I. Introduction The principle of DC Penning discharge to absorb electrons has been applied to the design of vacuuming equipment