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二氯硅烷的沸点只有8．3℃，常温下呈气体状态，用常规的方法取样和检测难度很大．我们用高温富氢还原的方法，使二氯硅烷中的磷还原为PH3，用气相色谱法测定．并在炉口设计了锥形惰性气氛保护炉口装置，有效的防止了氢爆．保证测试安全并能连续进样、操作简便、省时．同时利用NaOH富集，解决了主体干扰杂质的问题．方法灵敏、可靠、简便、灵敏度由0．1μg／1提高到0．0μg／1．
Dichlorosilane has a boiling point of only 8.3 ° C and is gaseous at room temperature. Sampling and testing are very difficult with conventional methods. We use high temperature hydrogen-rich reduction method, the dichlorosilane phosphorus was reduced to PH3, determined by gas chromatography. And in the mouth of the mouth designed to protect the inert atmosphere Inert tunnel device, effectively prevent the hydrogen burst. Ensure the test safety and continuous injection, easy to operate, time-saving. At the same time the use of NaOH enrichment, to solve the main problem of interference impurities. The method is sensitive, reliable and simple, and the sensitivity is increased from 0.1μg / 1 to 0.0μg / 1.