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c-axis-oriented SmBa_2Cu_3O_7(SmBCO) films have been deposited on(100)- LaA1O_3(LAO)substrate by metal organic chemical vapor deposition(MOCVD) technique.The effects of deposition temperature(T_(dep)) and total pressure(P_(tot)) on the orientation and microstructure of SmBCO films were investigated.The orientation of SmBCO films transformed from α-axis to c-axis with increasing of T_(dep) from 900 to 1 100℃.At T_(dep)=1 050℃,SmBCO films had c-axis orientation and tetragon surface.At P_(tot)~(dep)=400-800 Pa and T_(dep)=1 050 ℃,totally c-axis-oriented SmBCO films were obtained.The R_(dep) of SmBCO films increased firstly and then decreased with increasing P_(tot).The surface of SmBCO films exhibited tetragon morphology at 1 050 ℃ and400 Pa.Maximum thickness of SmBCO film deposited was 1.2μm at P_(tot)= 600 Pa,and the corresponding R_(dep)was 7.2 μm·h~(-1).
c-axis-oriented SmBa_2Cu_3O_7 (SmBCO) films have been deposited on (100) - LaAlO 3 (LAO) substrate by metal organic chemical vapor deposition (MOCVD) technique.Theses of deposition temperature (T_ (dep)) and total pressure (tot)) on the orientation and microstructure of SmBCO films were investigated. The orientation of SmBCO films transformed from α-axis to c-axis with increasing T_ (dep) from 900 to 1 at 100 ° C. At t_ (dep) = 1 SmBCO films had c-axis orientation and tetragon surface. At Pt ~ (dep) = 400-800 Pa and T_ (dep) = 1 050 ° C, totally c-axis-oriented SmBCO films were obtained. R dep (dep) of SmBCO films increased first and then decreased with increasing P tot. The surface of the SmBCO films extracted tetragon morphology at 1 050 ° C and 400 Pa. Maximum thickness of SmBCO film deposited was 1.2 μm at Pt - (tot) = 600 Pa, and the corresponding R_ (dep) was 7.2 μm · h -1.