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离轴磁控溅射法克服了传统磁控溅射二次电子和阴离子反刻蚀的缺点,改善外延薄膜的质量。本文从磁控溅射原理出发分析离轴磁控溅射相对于其他外延薄膜生长方式的优势,介绍了离轴磁控溅射的发展,重点综述离轴法制备近年来备受关注的YBa2Cu3O1-x,PbZrxTi1-x和BiFeO3系钙钛矿结构外延薄膜的研究进展。
Off-axis magnetron sputtering overcomes the disadvantages of traditional magnetron sputtering secondary electrons and anion anti-etching and improves the quality of epitaxial films. In this paper, the principle of off-axis magnetron sputtering is compared with that of other epitaxial thin films based on magnetron sputtering principle. The development of off-axis magnetron sputtering is introduced. The recent development of off-axis magnetron sputtering of YBa2Cu3O1- Research progress of x, PbZrxTi1-x and BiFeO3 perovskite epitaxial thin films.