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由电池驱动以微机械技术制造的气体传感器的功耗是十分关键的实际问题。为了研制低功耗气体传感器,在传感器阵列上表面制备完成后,从下表面腐蚀传感器芯片的基底,以造成传感器芯片和封装室之间形成一个空气夹层。从而对有空气夹层的传感器芯片和没有空气夹层的传感器芯片的能耗做比较。实验结果显示,腐蚀过的传感器芯片具有较低的功耗。
The power consumption of gas sensors made of battery-driven micromechanical technology is a crucial practical issue. In order to develop a low-power gas sensor, after the upper surface of the sensor array is prepared, the substrate of the sensor chip is etched from the lower surface to form an air interlayer between the sensor chip and the package chamber. This compares the power consumption of sensor chips with air interlayer and sensor chips without air interlayer. Experimental results show that the eroded sensor chip has lower power consumption.