报道了以体硅表面硅混合微加工工艺制作在SOI衬底上的一种新型复合静电驱动结构致动内旋转微镜,其中复合静电驱动结构由一个平板驱动器和一个垂直梳齿驱动器构成.实验表明,该新型驱动结构不仅能使微镜实现大范围连续旋转,而且能使微镜实现吸合效应致自发性90°旋转.微镜的连续旋转范围扩大到约46°,同时引发吸合效应的拐点电压也增大.对于具有1和0.5μm厚扭转弹性梁的微镜,实测拐点电压分别为390～410V和140～160V.当该微镜用作光开关时,测得光插入损耗为-1.98dB. A new type of composite inner-rotating micro-mirror driven by SOI substrate is fabricated on a silicon-on-silicon hybrid micromachining process, in which the composite electrostatic driving structure consists of a flat-plate driver and a vertical comb-tooth driver. The results show that the novel driving structure not only enables the micromirror to rotate continuously in a wide range but also enables the micromirror to achieve spontaneous 90 ° rotation due to the pull-in effect.The micromirrors’ continuous rotation range is expanded to about 46 ° and the pull-in effect The voltage at the inflection point also increases.For micromirrors with 1 and 0.5 μm thick torsional elastic beams, the measured inflection points are 390-410 V and 140-160 V. When the micromirror is used as an optical switch, the measured optical insertion loss is -1.98dB.