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在低合金钢表面离子束合成类金刚石改性涂层， 显微硬度达２ ０００～３ ０００ ｋｇ／ｍ ｍ ２， 电阻率达１０８～１０１２Ω·ｃｍ 水平， 使其具有优良的耐磨耐蚀性。由于良好的冷却， 能量小于１ ０００ ｅＶ 的离子束不会使衬底钢组织产生明显变化， 但离子束能量对类金刚石膜显微硬度、电阻率及生长速率具有显著影响。
On the surface of low alloyed steel, the diamond-like modified coating synthesized by ion beam has a microhardness of 2 000 ~ 3 000 kg / m 2 and a resistivity of 108 ~ 10 12 Ω · cm, which makes it have excellent wear resistance and corrosion resistance . Due to good cooling, ion beam energy less than 1 000 eV does not change the microstructure of the substrate steel significantly, but the ion beam energy has a significant effect on the microhardness, electrical resistivity and growth rate of diamond-like carbon films.