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介绍了利用聚焦离子束设备在多种半导体材料上成功研制的近红外波段二维光子晶体,给出了相关微加工结果,发现微加工的尺寸和理论设计尺寸相吻合;测试了所加工的无源光子晶体光子带隙和有源光子晶体的发光谱.实验证明聚焦离子束可以研制二维光子晶体及相关光子晶体器件.
The two-dimensional photonic crystal in near infrared region successfully developed by using focused ion beam equipment is introduced. The related micro-fabrication results are given. It is found that the size of the micro-fabrication coincides with the theoretical design size. Source photonic bandgap photonic bandgap and active photonic crystal luminescence spectrum.The experiment proves that focused ion beam can develop two-dimensional photonic crystal and related photonic crystal device.