衍射光学元件在国防、生产及科研等领域起着越来越重要的作用。衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。薄膜沉积法具有精确控制台阶高度及台阶表面较光滑的优点。使用薄膜沉积法制作1 6阶菲涅耳透镜 ,用它代替常规的光学透镜可实现系统的轻量化、小型化、增加系统设计的自由度。测量了菲涅耳透镜的衍射效率并分析产生误差的原因。 Diffractive optical elements play an increasingly important role in national defense, manufacturing and research fields. Diffractive optical element fabrication techniques include laser or electron beam direct writing, reactive ion etching, ion beam milling and thin film deposition. Thin film deposition method has the advantages of precise control of the step height and the smoothness of the step surface. The use of thin film deposition method to produce 16 Fresnel lens, instead of using conventional optical lens system can achieve the lightweight, miniaturization, increase system design freedom. The diffraction efficiency of the Fresnel lens was measured and the cause of the error was analyzed.