论文部分内容阅读
在N-on-1测试模式下研究了多层介质膜光栅的激光预处理效应。实验发现,激光预处理之后多层介质光栅膜的阈值能提高到处理前阈值的1.5～2.0倍。预处理机制可能是低能量密度激光辐照减少了光栅表面的污染物并降低了光栅表面的粗糙度。激光预处理可以作为优化光栅结构、酸洗等一系列提高多层介质膜光栅阈值方法的一个补充。
The laser pretreatment effect of multi-layer dielectric film gratings was investigated in N-on-1 test mode. The experimental results show that the threshold of multi-layer dielectric grating can be raised 1.5-2.0 times before pretreatment. The preconditioning mechanism may be that low energy density laser irradiation reduces the contamination on the grating surface and reduces the roughness of the grating surface. Laser pretreatment can be used as a supplement to a series of methods to improve raster threshold of multilayer dielectric films, such as optimized grating structure and pickling.