一、引言 TDR-50型单晶炉是我国第一台软轴CZ单晶炉,它是自1981年到1983年通过基础实验研究,结合我国生产单晶炉的经验而研制成功的。样机经过工业运行和检测鉴定证明,在主要精度和性能指标方面,达到了国际上同类设备七十年代末期水平。为我国CZ法生产75毫米硅单晶提供先进设备。 七十年代后期,国际上大型CZ单晶炉 I. INTRODUCTION TDR-50 single crystal furnace is the first CZ single crystal furnace with flexible shaft in China. It was successfully developed from the basic experimental research from 1981 to 1983 combined with the experience of China’s production of single crystal furnace. Prototype after industrial operation and testing proved that in the main precision and performance indicators, reached the international level of similar equipment in the late seventies. CZ France for the production of 75 mm silicon single crystal to provide advanced equipment. The late seventies, the international large-scale CZ single crystal furnace