采用真空溅射沉积技术在硅单晶Ｓｉ（１１１）面上制备厚度约为１８ｎｍ的银超细微晶膜（ＡｇＵＦＣＰ）．用掠入射Ｘ射线散射技术分析了ＡｇＵＦＣＰ的结构和膜与衬底Ａｇ／Ｓｉ（１１１）界面形态．用广角Ｘ射线衍射和径向分布函数探索了ＡｇＵＦＣＰ的半晶态结构特征．用差热扫描量热法检测分析了银超细微晶粒子的表面原子结构，揭示了超细微晶粒子表面生长的热动力学机理对表面壳层结构的温度依赖性． A silver ultrafine crystallite film (AgUFCP) with a thickness of about 18 nm was prepared on Si (111) surface by vacuum sputtering deposition. The structure of AgUFCP and the Ag / Si (111) interfacial morphology between the film and the substrate were analyzed by grazing incidence X-ray scattering. The characteristics of the semicrystalline structure of AgUFCP were explored by wide angle X-ray diffraction and radial distribution function. The differential scanning calorimetry (DSC) method was used to detect and analyze the surface atomic structure of ultrafine silver particles, revealing the temperature dependence of the thermodynamic mechanism of surface growth on the surface shell structure.