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提出了用离子色谱测定高纯水和高纯硅烷中痕量阴离子的方法。用适当浓度的淋洗液稀释标准溶液,从而可以很好地分解F~-峰。通过控制环境污染,可得到平滑基线、很低的空白值及峰高与浓度间的良好线性关系。提高了检测灵敏度,F~-、Cl~-、NO_3~-、HPO_4~(2-)、SO_4~(2-)等阴离子的检测限分别为0.1,0.05,0.5.0.5及0.1Ppb。方法快速、可靠、准确,可用于测定大规模集成电路生产过程中的阴离子污染。
A method for the determination of trace anions in high purity water and high purity silanes by ion chromatography has been proposed. Dilute the standard solution with the appropriate concentration of eluent to break the F - peak well. By controlling environmental pollution, a smooth baseline, a very low blank value and a good linear relationship between peak height and concentration can be obtained. The detection limits of F ~ -, Cl ~ -, NO_3 ~ -, HPO_4 ~ (2 -) and SO_4 ~ (2-) were 0.1,0.05,0.5.0.5 and 0.1Ppb, respectively. The method is fast, reliable and accurate and can be used for the determination of anionic contamination in the production of large scale integrated circuits.