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采用真空阴极多弧离子镀技术制备了Al Cr N多元复合纳米硬质涂层,利用洛氏硬度计、划痕仪、HV显微硬度计、球磨仪、扫描电子显微镜、能谱仪及X射线衍射仪检测并分析了涂层膜基结合力、显微形貌、相结构以及基体硬度、涂层厚度对涂层硬度的影响。结果表明,涂层以Al Cr N/Cr N结构沉积,随着涂层厚度的增加,膜基结合强度提高。涂层表面成波纹状,有少量大颗粒,涂层内部呈Na Cl结构,含有大量呈柱状形式生长的面心立方的c-Cr N相和c-Al N相,择优取向均为(200)。同等基体硬度时,涂层厚度的增加有利于涂层硬度的提高,最佳涂层厚度为3.5~5.0μm。同等涂层厚度时,涂层硬度随着基体硬度的增加而增加,当涂层厚度低于4.0μm,基材硬度是影响涂层塑性变形抗力的主要因素。
Al Cr N multi-component composite nano-hard coating was prepared by vacuum cathodic arc-assisted ion plating technique. The hardness of the coating was measured by Rockwell hardness tester, scratch tester, HV microhardness tester, ball mill, SEM, EDS and X-ray Diffractometer detects and analyzes the coating film base adhesion, microstructure, phase structure and substrate hardness, coating thickness on the hardness of the coating. The results show that the coating is deposited as Al Cr N / Cr N with the increase of coating thickness, and the film-based bonding strength increases. The surface of the coating is corrugated with a few large particles. The NaCl coating has a large number of face-centered cubic c-Cr N and c-Al N phases. The preferred orientation is (200) . The same substrate hardness, the increase in coating thickness is conducive to the improvement of coating hardness, the best coating thickness of 3.5 ~ 5.0μm. When the coating thickness is the same, the hardness of the coating increases with the increase of the substrate hardness. When the coating thickness is less than 4.0μm, the substrate hardness is the main factor that affects the plastic deformation resistance of the coating.