本文是一篇论述当前体声波延迟线技术水平的述评.该器件的特征是高达100μs的长延迟、小型化和采用能在1—10GHz微波频段工作的压电薄膜换能器.基本设计考虑包括本器件能实现的带宽、插入损耗和延迟时间等技术要求.文章叙述了在兰宝石上溅射ZnO的成膜工艺、阻抗匹配和封装操作.接着介绍了传输式和反射式两种类型延迟线的工作原理、结构、性能以及它们在定标和雷达信号处理中的应用. This article is a review of current state-of-the-art delay techniques for BAW. The device features long delays up to 100 μs, miniaturization and use of piezoelectric thin film transducers that operate in the 1-10 GHz microwave band. Basic design considerations include This device can achieve the bandwidth, insertion loss and delay time and other technical requirements.The article describes the sputtering of ZnO on sapphire sputtering film forming process, impedance matching and packaging operations.Then describes the transmission and reflection of two types of delay line The working principle, structure, performance and their application in calibration and radar signal processing.