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介绍了扫描探针显微镜的发展与分类;对原子力显微镜的三种工作模式的优劣作了比较;重点叙述了轻敲式原子力显微镜的工作原理;引出了轻敲式原子力显微镜应用的一种新技术——相位成像技术;最后简单介绍了由北京市中科机电设备公司于2001年9月推出的Nspm-6800型扫描探针显微镜。
The development and classification of scanning probe microscope are introduced. The advantages and disadvantages of three working modes of atomic force microscope are compared. The working principle of tapping atomic force microscope is mainly described. A new type of application of tapping AFM is introduced Technology - phase imaging technology; Finally, a brief introduction by the Beijing Municipal Bureau of Mechanical and Electrical Equipment Company in September 2001 launched Nspm-6800 scanning probe microscope.