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基于声表面波(SAW)驱动机理设计并仿真了一种微混合器,制备了由4个谐振频率为49.1 MHz的铜叉指式换能器(IDT)构成的SAW驱动的微混合器(IDT采用剥离工艺制备,使用的基片材料为128°YX型铌酸锂,每个IDT有5个叉指对,周期为80μm,指条宽度为5μm,指条厚度为1.6μm),搭建了基于SAW微混合器驱动的微混合平台,实现了3μL甘油与1μL墨水两种液滴间的混合以及3μL蒸馏水液滴和平均直径为1.5μm的红色微粒之间的混合。实验结果证明,在驱动功率为9 W、驱动频率为49.13 MHz的电信号激励下,SAW微混合器可实现液滴间以及液滴和微粒间在1 s内的高速混合,并且液滴内部运动与其位于SAW微混合器的位置有关。
A micromixer was designed and simulated based on the SAW driving mechanism. A SAW driven micromixer (IDT) consisting of four copper interdigital transducers (IDTs) with resonance frequency of 49.1 MHz was fabricated. Using a stripping process, using a substrate material of 128 ° YX type lithium niobate, each having five pairs of IDT fingers, a period of 80μm, a finger width of 5μm, finger thickness of 1.6μm) The SAW micromixer-driven micro-mixing platform enables mixing of two droplets of 3 μL glycerol with 1 μL of ink and mixing between 3 μL of distilled water droplets and red particles with an average diameter of 1.5 μm. Experimental results show that SAW micromixer can achieve high-speed mixing between droplets and between droplets and particles within 1 s under the excitation of an electric signal with a driving power of 9 W and a driving frequency of 49.13 MHz, and the internal movement of the droplets Related to its location in the SAW Micromixer.