利用x射线能谱仪进行无标样定量分析时,经常使用纯元素的标识x射线强度因子。随着电子探针使用的加速电压向低电压方向发展(如分析硅上的含硅化合物)和低压扫描电镜的发展,有必要在广泛的加速电压范围对强度因子的计算进行检验。Russ提出的无标样定量分析中给出了计算强度因子的方法,吴自勤等利用修正 When using x-ray spectrometry for standard-free quantitative analysis, the x-ray intensity factor of the pure element is often used. As the accelerating voltage applied to the electron probe has moved toward lower voltages (such as the analysis of silicon-containing compounds on silicon) and the development of low-pressure scanning electron microscopy, it has been necessary to examine the calculation of the intensity factor over a wide range of accelerating voltages. Russ proposed standard-free quantitative analysis gives a method to calculate the intensity factor, Wu Zi-Qin and other amendments