【摘 要】
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In this letter, we investigate the structural, optical, and electrical properties of Al-doped ZnO (AZO) thin film coating prepared by direct current (DC) facing-target sputtering method at room temperature, of which the average optical transmittance is 81
【出 处】
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ChineseOpticsLetters
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In this letter, we investigate the structural, optical, and electrical properties of Al-doped ZnO (AZO) thin film coating prepared by direct current (DC) facing-target sputtering method at room temperature, of which the average optical transmittance is 81% between 400 and 700 nm while the sheet resistance is about 10 \Omega/. Then, based on this AZO coating, in order to enhance the transmittance, interfacial adhesion strength and weathering resistance, two kinds of antireflective coatings are designed for different application purposes. For the two kinds, the highest transmittances in the visible region (400–700 nm) can reach 86.9% and 81.8%, respectively. The design is performed using Macleod Optical Design software.
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