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文章概述了自行研制的亚纳克级全反射Ｘ射线荧光分析（ＴＸＲＦ）装置的结构和性能。该ＴＸＲＦ分析装置系利用本实验室已有的岛津ＸＤ－１型衍射仪的Ｘ光发生器及Ｃｕ靶衍射管作光源，从国外引进一套两次全反射光路组件，配以Ｓｉ（Ｌｉ）探测器－多道微机分析系统组装而成。使用与之配套而开发的ＳＰＡＮ／ＸＲＦＶ４．０Ｘ射线谱处理软件。实验测试结果表明，对原子序数为１６—２８诸元素，探测下限（ＭＤＬ）达０．１ｎｇ量级。
The article outlines the structure and performance of a self-developed Yannian-class total reflection X-ray fluorescence analysis (TXRF) device. The TXRF analyzer utilizes a X-ray generator and a Cu target diffracting tube of the existing Shimadzu XD-1 diffractometer in our laboratory as a light source, introduces a set of total reflection optical path components twice from abroad and is provided with Si (Li Detector - Multi-channel computer analysis system assembled. Use the accompanying SPAN / XRFV4.0X ray spectrum processing software developed. Experimental results show that for the 16-28 atomic number elements, the detection limit (MDL) of 0.1ng order of magnitude.