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为解决大尺寸测量的环境性和高精度性的矛盾问题,介绍了一种可用于工业现场大尺寸零件精密测量的装置。该装置以双纵模热稳频He-Ne激光器为光源,其拍频频率约为729MHz,拍频波长约412 mm;以拍频波长为测量基准,拍频波节点(过零点)为对准标志,用粗估的方法获取整数倍拍频半波长的长度,用组合于同一光路中的分系统激光干涉仪(分辨率为0.08μm)测量最邻近节点到被测点的尾数长度。测试表明,此装置具有很好的环境适应性和同类仪器中最高的频差稳定度。整个测量系统可在0~20 m范围内工作。测量不确定度优于±30μm/10 m。
In order to solve the contradiction between environment and high precision of large-scale measurement, a device that can be used for precision measurement of large-size parts in industrial field is introduced. The device uses a dual-longitudinal mode He-Ne laser as the light source with a beat frequency of about 729 MHz and a beat frequency of about 412 mm. Taking a beat frequency as a measurement reference, the beat frequency node (zero cross) is aligned Signs, the length of half-wavelength of the beat frequency is obtained by rough estimation, and the length of the mantissa of the nearest neighbor to the measured point is measured by the subsystem laser interferometer (with the resolution of 0.08μm) combined in the same optical path. Tests have shown that this device has a good environmental adaptability and the highest stability of the same frequency of similar instruments. The entire measurement system can work in the 0 ~ 20 m range. Measurement uncertainty better than ± 30μm / 10m.