论文部分内容阅读
Expermental results of the preparation of YBaCuO superconductor thin film on Si(100)substrate by the method of ion beam sputtering deposition is presented.A ZrO_2 buffer layerwas applied to Si(100)substrate,and was found to play an important role in resisting thediffusion of Si toward the film.The thin film is mainly a 123 phase with strong c-axis prefer-red orientation.The onset transition temperature of the film is 100 K and the final transitiontemperature 78 K.
Expermental results of the preparation of YBaCuO superconductor thin film on Si (100) substrate by the method of ion beam sputtering deposition presented. A ZrO 2 buffer layer was applied to Si (100) substrate, and was found to play an important role in resisting the diffusion of Si toward the film. The thin film is mainly a 123 phase with strong c-axis prefer-red orientation. The onset transition temperature of the film is 100 K and the final transition temperature of 78 K.