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离子束辅助淀积薄膜工艺是目前国内外薄膜界关心的课题。采用离子源进行离子束辅助淀积光学薄膜是八十年代国际上发展起来的新技术、新工艺。为尽快赶上世界先进水平,航天部三院8358所从84年7月开始,经过两年艰苦努力,精心探索,成功地研制出复合栅离子源装置,并使用该离子源对不同参数条件下淀积薄膜工艺进行了研究,获得了一套成熟工艺,制备出高质量光学薄膜。为我国光学镀膜开辟一条新的工艺途径。
Ion beam assisted deposition film technology is currently the topic of concern of the film industry at home and abroad. Ion source assisted ion beam deposition of optical films is the eighties developed internationally new technology, new technology. As soon as possible to catch up with the world advanced level, Space and Aerospace Institute of Hospitals 8358 from July 1984 onwards, after two years of hard work, careful exploration, successfully developed a compound gate ion source device, and the use of the ion source for different parameters Deposition film technology was studied, obtained a set of mature technology, prepared high-quality optical film. For our optical coating to open up a new technology approach.