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环境扫描电子显微镜在气体压力高达 660 0 Pa,温度高达 15 0 0℃ ,具有任何气体种类的多气环境里 ,都可提供高分辨率的二次电子成像。如此优良性能的获得 ,取决于两项新技术 :一是将柱形电子导管的真空环境与样品室环境分开 ;二是使用了一个在样品室非真空环境下仍然能起作用的二次电子探头。这些问题的解决是开发 ESEM的关键。
Environmental scanning electron microscopy provides high-resolution secondary electron imaging at gas pressures up to 6060 Pa and temperatures up to 1500 ° C in a multi-atmosphere environment with any gas species. The acquisition of such good performance depends on two new technologies: one is to separate the vacuum environment of the cylindrical electron tube from the sample chamber environment and the other is to use a secondary electron probe that still functions in a non-vacuum sample chamber . The solution to these problems is the key to developing ESEM.