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最近,东芝公司制作了一种采用电子束再结晶层的双层CMOS53级环形振荡器,据报道,在85年7月举行的第4次新功能器件技术座谈会上,该器件已获得了良好的特性。
Recently, Toshiba made a double-layer CMOS53 ring oscillator using an electron beam recrystallization layer. It was reported that the device was well received at the 4th New Functional Device Technology Symposium held in July, 1985 Features.