在半导体器件和光学器件生产中广泛的应用真空镀膜设备,制备各种薄膜,在镀膜过程中自始至终地观察蒸发和膜层形成情况,以控制膜层厚度,保证薄膜元件质量。 目前一般使用的镀膜设备其观察方法是:借助镀膜室玻璃钟罩或金属钟罩上开设的玻璃观察窗进行观察。有的用机械刷来擦除观 In the production of semiconductor devices and optical devices widely used in vacuum coating equipment, preparation of various films, throughout the coating process to observe the evaporation and film formation, in order to control the film thickness, to ensure the quality of thin film components. At present, the commonly used coating equipment is observed by the glass observation window provided on the coating room glass bell jar or the metal bell jar. Some use a mechanical brush to erase the concept