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本文研究制备一种由低折射率的SiOx层与高折射率的a-Si层周期性交叠构成的新型一维光子晶体(1D PC)背反射器.研究结果表明,随着SiOx/a-Si交叠周期数的增加,一维光子晶体的反射率逐步提高.当周期数大于3时,在空气中500—750 nm波长范围的平均反射率达到96%.将该一维光子晶体作为背反射器应用于NIP型非晶硅电池(电池结构为玻璃/1D PC/AZO/NIP a-Si:H/ITO),当光子晶体周期为4时,效率达到7.9%,略优于传统的AZO/Ag背反射电极结构电池(7.7%),明显高于不锈钢衬底电池(6.9%),相对效率提升14.5%.
In this paper, a novel one-dimensional photonic crystal (1D PC) back reflector consisting of a low refractive index SiOx layer and a high refractive index a-Si layer periodically overlaps is fabricated. The results show that with the SiOx / a-Si When the number of cycles is more than 3, the average reflectivity reaches 96% in the wavelength range of 500-750 nm in air. The one-dimensional photonic crystal is used as back reflection The device is applied to NIP-type amorphous silicon cell (cell structure is 1D PC / AZO / NIP a-Si: H / ITO). When the photonic crystal period is 4, the efficiency reaches 7.9%, slightly better than the traditional AZO / Ag back reflector battery (7.7%), significantly higher than the stainless steel substrate battery (6.9%), the relative efficiency increased by 14.5%.