论文部分内容阅读
用１２０ｋｅＶＮ＋、Ａｒ＋、Ｆｅ＋辐照聚酰亚胺薄膜，辐照剂量为５×１０１４—１×１０１７ｉｏｎｓ／ｃｍ２。对辐照样品做了表面电阻和光学吸收测量，结果表明：辐照后样品的表面电阻有明显变化，且随辐照剂量变化呈现阈值，在高剂量下达到饱和值．在不同辐照剂量和深度下用ＸＰＳ和ＲＢＳ方法测量了样品原子浓度和化学结构的变化，研究了辐照引起化学结构变化和表面改性间的内在联系，讨论了离子能量沉积过程．
The polyimide film was irradiated with 120keVN +, Ar +, Fe + and the irradiation dose was 5 × 1014-1 × 1017ions / cm2. The surface resistance and optical absorption of the irradiated samples were measured. The results showed that the surface resistance of irradiated samples changed obviously, and the threshold value changed with the irradiation dose, reaching the saturation value at high dose. The changes of atomic concentration and chemical structure were measured by XPS and RBS at different irradiation doses and depths. The intrinsic relationship between chemical structure change and surface modification induced by irradiation was studied. The ion energy deposition process was discussed.