【摘 要】
：
Nanocrystalline (nc) 3C-SiC films on the Si substrate were prepared by the helicon wave plasma enhanced chemical vapor deposition (HW-PECVD) technique. With the
【机 构】
：
College of Physics Science and Technology
论文部分内容阅读
Nanocrystalline (nc) 3C-SiC films on the Si substrate were prepared by the helicon wave plasma enhanced chemical vapor deposition (HW-PECVD) technique. With the SiH4-CH4 gas flow ratio changing, the films exhibit different photoluminescence (PL) characteristics. Under the stoichiometric condition, the PL peak redshift from 470 nm to 515 nm is detected with the increase of excitation wavelength, which can be attributed to the quantum confinement effect radiation of 3C-SiC nanocrystals of different sizes. However, the appearance of an additional PL band at 436 nm in Si-rich film might be sourced back to the excess of Si defect centers in it. This is also the case for C-rich film for its PL band lying at 570 nm. The results above quoted indicate an important influence of gas flow ratio on the PL properties of the SiC films providing an effective guidance for analyzing the luminescence mechanism and exploring the high-efficiency light emission of the SiC films.
其他文献
It is well known that grinding techniques are main methods to machine hard and brittle materials such as engineering ceramics. But the conventional grinding has
Hexagonal-plate BaFe12O19 nano-particles were prepared by combining the co-precipitation and molten-salt method. The effects of molten-salt NaCl on the products
The sapphire (Al2O3) single crystal is a kind of excellent infrared transmission window materials. A large-sized sapphire (Φ225 mm×205 mm, 27.5 kg) was grown
Residual stresses in ion-implanted NiTi alloy are measured by a combined method of Moiré interferometry and hole-drilling. Oxygen ions are implanted into the N
Mixed micron-sized Cu/Ti3SiC2 (vol5%) powder was mechanically milled using agate balls and zirconia balls separately. Then followed an examination of it with th
The hydrogenated amorphous silicon nitride (SiNx) thin films embedded with nano-structural silicon were prepared and the microstructures at the interface of sil
In order to fabricate a kind of high strength particulate reinforced aluminum-matrix composites, the high strength aluminum alloy 7055 was selected as a matrix.
Hydrogenated nanocrystalline silicon carbide (SiC) thin films were deposited on the single-crystal silicon substrate using the helicon wave plasma enhanced chem
阳泉市梅苑小区l#平台坡体上建有多幢别墅,因坡脚开挖,诱使坡体失稳,危及坡上建筑物的安全,且使坡脚商住楼施工难以实施。采用抗滑短桩和抗滑挡墙的联合抗滑措施,成功地解决
该文从挂篮荷载计算、施工流程、支座及临时固结施工、挂篮安装及试验、合拢段施工、模板制作安装、钢筋安装、混凝土的浇筑及养生、测量监控等方面人手,介绍了S226海滨大桥