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本文是一篇叙述压电石英谐振器做为传感器,实现工艺气体含水量在线连续自动检测的文章。文中着重阐述了压电吸附式传感器亲水膜的吸附原理和特性,传感器频率响应方程的推导,传感器长期使用稳定度的控制等问题,同时论述了这类传感器在气体含水量分析中的应用,其中包括检测原理,仪器构成,以及作者研制的FYS-1压电式微水分析仪同美国Dupont510微水分析仪主要性能的比较。
This article is a description of the piezoelectric quartz resonator as a sensor to achieve process gas online automatic continuous detection of the article. In this paper, the adsorption principle and characteristics of the hydrophilic membrane of the piezoelectric adsorption sensor, the derivation of the frequency response equation of the sensor and the control of the long-term stability of the sensor are emphatically described. Meanwhile, the application of these sensors in the gas moisture content analysis is discussed. Including the detection principle, the composition of the instrument, as well as the author’s FYS-1 piezoelectric micro-water analyzer with the United States Dupont510 micro-water analyzer main performance comparison.