Growth dynamics of epitaxial (Ba, Sr)TiO3 thin films deposited at different temperatures on SrRuOa/SrTiO3substrates by pulsed laser deposition is investigated by transmission electron microscopy. The films exhibit a layered structure comprising sublayers with distinctive features in regard to the remaining strain, density of misfit dislocations and/or lattice defects, and growth habit. We correlate these temperature-dependent features with the predominant misfit-strain relaxation mechanisms for each one of the detected growth regimes. The thickness dependence of the film structure is discussed within the framework of the predictions for a kinetically modified Stranski-Krastanov growth mode.