论文部分内容阅读
准分子微细加工技术是80年代发展起来的新兴技术。由于技术自身的强大生命力,加之VLSI(超大规模集成电路)和OEIC(光电集成电路)的迫切需要,特别是世界各国政府和有关学者的高度重视,这一技术近年来得到长足进展,其中有些已达到实用化程度,如准分子激光曝光机和激光CVD、掺杂、刻蚀复合加工机均已投放市场。为发展这一新兴技术,日本通产省制定了1986～1993年“超先端加工系统”8
Excimer microfabrication technology is an emerging technology developed in the 1980s. Due to the strong vitality of technology itself, coupled with the urgent needs of VLSI (Very Large Scale Integrated Circuit) and OEIC (Optoelectronic Integrated Circuit), and especially the governments and relevant scholars all over the world, this technology has made great strides in recent years. Some of them have been To achieve the degree of practicality, such as excimer laser exposure and laser CVD, doping, etching composite processing machines have been put on the market. To develop this emerging technology, the Ministry of International Trade and Industry of Japan formulated 1986 ~ 1993 “super-advanced processing system ” 8