通过对玻璃、陶瓷、金属3个试件进行超精密加工,使试件表面粗糙度达到纳米级,采用非破坏性的X射线衍射sin2ψ法测量原理对不同试件的残余应力进行了测试研究。结果表明:在本试验条件下,3个试件都只存在残余压应力,并且陶瓷的残余压应力最大,金属残余压应力最小。 Three samples of glass, ceramic and metal were ultra-precision machined to make the surface roughness of the sample reach nanometer level. The residual stress of different specimens was tested by the non destructive X-ray diffraction sin2ψ measurement principle. The results show that there are only residual compressive stresses in the three specimens under the test conditions, and the residual compressive stress of ceramics is the largest and the compressive residual stress of metal is the minimum.