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在分析了当前制作微机电系统的几种技术的基础上 ,采用自由度较大的、制作复杂结构能力较强的光造型 (SL )技术。研究过程中在以下方面有所进展与创新 :STL文件纠错、CAD直接切片、固化单元研究、提出与传统机械设计不同的设计思想及方法等。为解决光造型技术在微系统的设计及加工过程中存在的问题提出了以下措施 :在微机电系统设计中采用虚拟现实技术 ;改进制造工艺以提高精度和速度 ;利用多种复合材料制作微零件 ;结合多种微细加工技术研究微系统整体制造工艺。
Based on the analysis of several technologies of microelectromechanical systems currently used, the optical modeling (SL) technology with high degree of freedom and capable of making complex structures is adopted. In the process of research, some advances and innovations have been made in the following aspects: STL file error correction, direct slicing of CAD, research of curing unit, and design ideas and methods different from traditional mechanical design. In order to solve the problems existing in the design and processing of micro-system, this paper puts forward the following measures: adopting virtual reality technology in micro-electro-mechanical system design; improving manufacturing process to improve accuracy and speed; making micro-parts by using various composite materials ; Combined with a variety of micro-processing technology to study the overall micro-system manufacturing process.