本文叙述了金钢石低压合成的现状及其发展过程。对作者采用的电子轰击CVD工艺的实验方法和所制得的薄膜作了评价,对物理特性进行了说明。 1、引言金刚石作为宝石而闻名于世。但是,作为宝石使用的金刚石其数量甚微,世界上消耗最多的是用于切削,研磨。对于这方面,金刚石是有效的,人们采用的金刚石有天然金刚石和人造金刚石。 This paper describes the current status of low-pressure diamond synthesis and its development process. The author used the electron impact CVD process experimental methods and the resulting film was evaluated on the physical characteristics were described. 1, Introduction Diamond is famous as a gem. However, the amount of diamond used as a precious stone is very small, and the most consumed in the world is for cutting and grinding. Diamonds are effective in this regard, and people use natural diamonds and synthetic diamonds.