电子能谱技术是近年来迅速发展的表面物理研究手段及化学成分与结构的有力分析工具。它的基本思想是测量在各种激发(如X射线、紫外光、电子、离子)下由物质表面逸出的电子动能谱,据以推断物质的电子能级结构,由之探讨有关的物理、化学问题[1].准确测定电子动能谱当然是电子能谱 Electron spectroscopy is a rapidly developing surface physics research tool and a powerful analytical tool of chemical composition and structure in recent years. Its basic idea is to measure the electron kinetic energy spectrum that escapes from the surface of materials under various stimuli (such as X-ray, ultraviolet light, electron and ion), infer the electronic energy level structure of the matter and discuss the relevant physical, Chemistry [1]. Accurate determination of the electron kinetic energy spectrum is, of course, the electron spectrum